A-Tech System

In-Iine Cathodic Vacuum Arc Deposition System (ATS-PVD Series)

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Quick Information

  • Model Number : Inline CVA-70P

Description

Special Features

  • In-Iine system with 4 arc guns for dielectric materials deposition on 70 inch glass (base prossure : 1 x 10 -6 Torr)

  • Equiped with mechanical, booster and cryogenic pumping system

  • Automatically controlled in substrate moving

  • Applications
    - Coatings for PDP electrode protection (eg. MgO etc.)

  • Average throughput : Up to 30,000 sheets per year


  • Dimension : 3,000L x 2,000H x 1,000W (mm3)

  • Others
    - Power : 4 power supplies for arc deposition (DC 200A/100V), 6 heaters for substrate heating (DC 35A/220V)
    - Heater : nichrome (heating rate : 50°C/min, max. temp.: 450°C, temp. deviation : negligible)
    - Gas : Ar / O2
    - Pump : rotary (1,000I/min) & booster (1,500I/min) cryogenic (3,000I/s)


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    • In-Iine Cathodic Vacuum Arc Deposition System (ATS-PVD Series) image

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